激光器部分: Wavelength: 248nm Pulse Energy ≥400mJ Average Power: no less than 40W Max. Rep. Rate:100Hz Pulse Duration: 20 ns Pulse-to-Pulse Stability(1 Sigma):no larger than 2% Beam Dimensions(V×H): 6×21 mm Beam Divergence(V×H): 1.5×4.5 mrad |